DETECTION APPARATUS FOR DETECTING ELECTRIC FIELD DISTRIBUTION OR CARRIER DISTRIBUTION BASED ON THE INTENSITY OF HIGH-ORDER HARMONICS

摘要

A detection apparatus having means for evaluating generation and disappearance of a carrier is provided. A detection apparatus detects, on the basis of high-order harmonics, an electric field distribution or a carrier distribution between electrodes arranged on an object to be observed. The detection apparatus includes an emission unit for emitting a fundamental wave to the object, a detection unit for detecting the high-order harmonics generated according to the electric field distribution or the carrier distribution in the object when a voltage is applied to the object, an excitation emission unit for emitting an excitation light for generating a carrier in the object, and a control signal output unit for outputting a second signal to cause the excitation emission unit to emit the fundamental wave to the object on the basis of a first signal of the excitation emission unit, and outputting a third signal to cause the detection unit to detect the high-order harmonics, wherein the control signal output unit is configured to change a time interval from when the first signal is output to when the second and third signals are output.