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After production manner null of the microchip which possesses
After production manner null of the microchip which possesses
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机译:生产后拥有的微芯片无效
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摘要
PROBLEM TO BE SOLVED: To provide a manufacturing method of a microchip capable of forming a non-adhesive part without using a mask and applying a non-adhesive substance or a plasma-inactivated substance in case of manufacturing the microchip having the non-adhesive part.;SOLUTION: In the method of manufacturing the microchip having the non-adhesive part by subjecting a pasting surface of at least one of the first substrate and the second substrate, both being composed of a permanently bondable material, to surface modification treatment and then pasting both the substrates on each other, the first substrate is pasted on the second substrate while a portion of the outer surface of the first substrate which corresponds to a portion becoming the non-adhesive part, is lifted by a suction means, thereby keeping the portion becoming the non-adhesive part between both the substrates peeled off. After the activated state by the surface modification treatment disappears, the lift of the first substrate by the suction means is stopped to form the non-adhesive part.;COPYRIGHT: (C)2010,JPO&INPIT
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