Directing to the central processing unit which administers specified treatment in decompression atmosphere, supply manner of the treatment

摘要

PROBLEM TO BE SOLVED: To provide a method for supplying a treatment gas polymerizable depending upon the temperature of HF gas or the like, making control of the supply amount (actual flow rate) of the treatment gas in an accurate and stable manner.;SOLUTION: This invention provides the method for supplying the treatment gas polymerizable depending upon the temperature, while controlling the flow rate to a treating apparatus (4) for treating an object (W), in a predetermined manner in a reduced pressure atmosphere. In supplying the treatment gas to the treatment apparatus (4), the flow rate of the treatment gas is regulated with a mass flow rate control unit (34) of a low differential pressure type which comprises a diaphragm, and has a proper operating range for supply pressure below the atmospheric pressure. According to this constitution, the supply amount (actual flow rate) of the treatment gas polymerizable is controlled, depending on the temperature of the HF gas or the like in an accurate and stable manner.;COPYRIGHT: (C)2008,JPO&INPIT