CARRYING DEVICE, PROCESSING SYSTEM, CONTROLLING METHOD OF CARRYING DEVICE, AND COMPUTER-READABLE RECORDING MEDIUM

摘要

PROBLEM TO BE SOLVED: To provide a carrying device capable of detecting a contact with an obstacle even under a decompression environment.;SOLUTION: A carrying device comprises: a supporting member 71 capable of moving forward and backward, and supporting a carrying body G; and a sensor 8 for detecting that a tip end of the supporting member 71 contacts with an obstacle when the supporting member 71 moves forward. The sensor 8 includes: a first conductive ring 81 provided so as to ground with a tip end of the supporting member 71, and having flexibility; a second conductive ring 82 provided on an inner side of the first conductive ring 81 while separating from the first conductive ring 81; and a detector for detecting that the first conductive ring 81 and the second conductive ring 82 are short-circuited, when the first conductive ring 81 contacts with an obstacle to deform and then contacts with the second conductive ring 82.;COPYRIGHT: (C)2012,JPO&INPIT