Refining the phosphine content German, it regards the manner and the system in order to offer the refinement German product. Manner of this invention is the manner which produces the refinement German product which contains the phosphine which is less than 50ppb, the German gas which includes phosphine is prepared; Passing through the German gas which includes aforementioned phosphine to the absorbent, choice; The phosphine which is included is made to absorb; And the manner which includes the fact that the German gas which was refined is fetched.
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