PLASMA IGNITION APPARATUS, PLASMA IGNITION METHOD, AND PLASMA GENERATOR

摘要

PROBLEM TO BE SOLVED: To provide a plasma ignition method with which easily and surely igniting and reigniting plasma without being monitored or requiring human intervention are possible.;SOLUTION: A plasma ignition apparatus includes: a high-frequency power supply device 101 for generating a predetermined high-frequency signal HS to supply it to a load electrode 114 for generating plasma; an impedance matching device 105 for impedance matching between the high-frequency power supply device side and the load electrode side; a travelling-wave/reflected-wave detecting device 102 for detecting a traveling wave and a reflected wave of the high-frequency signal HS; a high-voltage generating device 103 for generating a predetermined high voltage HV; and a control device 100 which superimposes the high voltage HV on the high-frequency signal HS when a ratio of the reflected wave to the traveling wave is greater than a first threshold.;COPYRIGHT: (C)2012,JPO&INPIT