METHOD FOR EVAPORATING/SUBLIMATING EVAPORATION MATERIAL IN VACUUM DEPOSITION APPARATUS AND CRUCIBLE DEVICE FOR VACUUM DEPOSITION

摘要

PROBLEM TO BE SOLVED: To perform continuous operation for a long period of time while restraining the deterioration of a vapor deposition material.SOLUTION: A radiant heater 21 radiating a heating wave mainly using wavelengths of infrared rays is inserted in a heating wave transmissing tube 22 formed of a material transmissible of infrared rays, and is then arranged in a crucible holder 13. The surface of a vapor deposition material M in a crucible body 12 is irradiated with the heating wave from the radiant heater 21 to heat the surface and to evaporate or sublimate only the surface of the vapor deposition material M. Even when the evaporated or sublimated vapor deposition material M sticks on the surface of the heating wave transmissing tube 22 or on the inner surface of the crucible body 12 and the crucible holder 13, the stuck vapor deposition material is heated by the heating wave and again evaporated or sublimated.