Gray-tone mask blank, gray-tone mask, and product processing label or product information labeling method of formation

摘要

PROBLEM TO BE SOLVED: To provide a gray-tone mask blank, on which a marker can be formed by a lithographic process of removing either a light-shielding film or a translucent film, even when a marker for product processing or a marker for product information is to be formed of a translucent film and a light-shielding film, and a marker which is readable by utilizing the reflected light at a predetermined wavelength for reading can be formed, and to provide a method for forming a marker for product processing or a marker for product information which is to be formed on a gray-tone mask.;SOLUTION: The gray-tone mask blank is such that: a translucent film and a light-shielding film are formed of films, having etching characteristics different from each other on a transparent substrate; the reflectance of each of the translucent film and the light-shielding film is not more than 30% at the wavelength of exposure light; the difference in the reflectance between the translucent film and the light-shielding film at a predetermined wavelength in the longer wavelength side than the wavelength of exposure light is larger than the difference in the reflectance at the wavelength of exposure light; and the light-transmitting film and the light-shielding film in a gray-tone mask configuration can be identified by the difference in the reflectance between a translucent part and a light-shielding part, by having the translucent part and the light-shielding part irradiated with light at the predetermined wavelength, through either the top or the back surfaces of the gray-tone mask.;COPYRIGHT: (C)2010,JPO&INPIT