It sends the projection section which from side section opening of the head which installing the transparent adsorption section in lower part opening of the framework body which is reversed forms the framework body of concave form provides 2 mirrors for the point. The alignment mark which is recorded on the surface of the bump electrode and the baseplate which functioning are done both mirrors which are provided to the projection section it projects and, as the alignment mark which was formed to the surface of the tip/chip part which to the adsorption section it is adsorbed is kept and is packed. It projects to these both mirrors and both alignment mark which is packed, separating from the head, is projected to the CCD camera which is disposed to side side.
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