In the electric survey instrument which inspects the electric survey instrument and the inspection mannered null

摘要

PROBLEM TO BE SOLVED: To provide an electric inspection apparatus capable of surely achieving a contact of an object to be inspected with excellent reproducibility regardless of temperature of the moment, and to provide a method for inspecting the same.;SOLUTION: The electric inspection apparatus (1) has a tester (2) (prober) for inspecting the electric component to be inspected (39), especially for inspecting a wafer (40), into which a contact device (3) is inserted/insertable for the contact of the object (39). The apparatus includes a centering device (24) for accepting only a temperature compensation movement in the radial direction, which is used for mutually centering the contact device (3) and the tester (2).;COPYRIGHT: (C)2007,JPO&INPIT