Production method of nozzle plate and nozzle plate, liquid drop emission head and liquid drop emission

摘要

PROBLEM TO BE SOLVED: To provide a nozzle plate, a manufacturing method of the nozzle plate, a droplet discharge head, and droplet discharge device ensuring mechanical strength and excellent in operation characteristics such as landing characteristics and flying characteristics.;SOLUTION: The nozzle plate has a first silicon layer, a glass layer, a second silicon layer joined with the glass layer, and a silicon oxide layer provided between the first silicon layer and the second silicon layer. In the nozzle plate, a first nozzle hole for discharging droplets through the first silicon layer, a channel which penetrates through the silicon oxide layer and the second silicon layer and communicated with the nozzle hole, and a liquid chamber which is formed in the glass layer and communicated with the channel are formed.;COPYRIGHT: (C)2008,JPO&INPIT