Possessing the nozzle hole in order to emit the production mannered null liquid drop of the liquid drop emission device, and the silicon make nozzle substrate which load the liquid drop emission head and the liquid drop emission head which have

摘要

PROBLEM TO BE SOLVED: To provide a silicon-made nozzle substrate etc., excelling in durability to a discharge liquid without eroding the edge part of a nozzle hole with the discharge liquid, having a water-repellent film itself firmly and closely stuck from the beginning and attaining control of uniform coating and an accurate coating area in coating an inner wall of a nozzle hole and forming the water repellent film on a nozzle surface.;SOLUTION: The silicon-made nozzle substrate has the nozzle hole 11 for discharging liquid droplets. A discharge liquid-resisting protective film 13 formed of an oxide is continuously formed from a liquid droplet discharge side surface 1a of the nozzle hole 11 to the inner wall 11c of the nozzle hole 11, and the water-repellent film 14 is formed on the discharge liquid-resisting protective film 13. A protective film 12 formed of an oxide of the same material as the above oxide is continuously provided from the inner wall 11c of the nozzle hole 11 to a joint surface 1b, and the discharge liquid-resisting protective layer 13 is continuously provided on the protective film 12.;COPYRIGHT: (C)2009,JPO&INPIT