The minute sample base, the creation manner, being the very little sample base because the minute

摘要

PROBLEM TO BE SOLVED: To avoid breakage of a micro sample piece S during conveyance of a sample holder.;SOLUTION: This micro sample stand 10 the whole of which is made of silicon has a base part 11, fixing parts 12 and guard parts 13. The micro sample piece S is erected on the top of the fixing part 12 and fixed. The micro sample stand 10 has an integrated structure wherein two fixing parts 12 and three guard parts 13 are projected alternately on the upper surface 11A of the base part 11. The sample stand 10 is manufactured so that the thickness of the guard part 13 is thicker than that of the fixing part 12, and that the height (length in the Z-direction) of the guard part 13 is higher than that of the fixing part 12.;COPYRIGHT: (C)2008,JPO&INPIT