Laser processing apparatus and pulse signal output method for laser driving in laser processing apparatus

摘要

PPROBLEM TO BE SOLVED: To form pits in an adequate arrangement over the entire machining area of an object OB to be machined. PSOLUTION: The number of pits in the circumferential direction to be formed when a table 21 makes one turn is set to be same between the inner circumference and the outer circumference adjacent to each other in the locus of application of laser beam, and the circumferential pit spacing Bwt is corrected so that any excess is formed when the moving distance of the position of application of the laser beam in the application position moving section is divided by the preset circumferential pit spacing Bwt for each application position moving section of the laser beam after the reference rotational position is detected by the index signal before the next reference rotational position is detected by the next index signal. The period of the laser beam-driving pulse signal is calculated based on the corrected circumferential spacing Bwt(n) and the linear velocity of the laser beam application position. PCOPYRIGHT: (C)2010,JPO&INPIT