Being the method of controlling that surface microstructure with the process which produces the metallic oxide thin film in

摘要

PROBLEM TO BE SOLVED: To provide a new method for manufacturing a metal oxide thin film, using a precursor solution of a photochromic metal oxide, irradiation with an ultraviolet ray, and electric field application; and to provide a method for controlling a surface fine structure by irradiation with an ultraviolet ray and electric field application.;SOLUTION: The method for manufacturing the metal oxide thin film comprises forming a metal oxide thin film having a controlled surface fine structure on a substrate by using a precursor solution of a photochromic metal oxide. In the method for manufacturing the metal oxide thin film, two sheets of electroconductive substrates are immersed in the precursor solution of the photochromic metal oxide while applying an electric field between the electroconductive substrates used as electrodes, and then dip-coating, drying, calcining and a rapid heating treatment are performed to manufacture the thin film. The metal oxide thin film having a controlled surface fine structure, manufactured by the method, and a member using the metal oxide thin film are provided. Thereby, the metal oxide thin film having a controlled surface fine structure and the method for manufacturing the same can be provided.;COPYRIGHT: (C)2008,JPO&INPIT