Lithographic apparatus and device manufacturing method using the 2D run-length encoded image data compression

摘要

PROBLEM TO BE SOLVED: To provide a lithographic apparatus equipped with an array of individually controllable elements, and a data processing pipeline.;SOLUTION: The array of individually controllable elements modulates a beam of radiation. The data processing pipeline converts a first representation of a requested dose pattern to a sequence of control data suitable for controlling the array of individually controllable elements so as to substantially form the requested dose pattern on a substrate. The data processing pipeline compresses an offline preprocessing device and an online rasterizer. The offline pre-processing device converts the first representation of the requested dose pattern to an intermediate representation, which is rasterized in a fewer number of operations than the first representation.;COPYRIGHT: (C)2010,JPO&INPIT