Lithographic apparatus and device manufacturing method using the 2D run-length encoding the image data compression

摘要

PROBLEM TO BE SOLVED: To provide a lithographic apparatus comprising an array of individually controllable elements and a data processing pipeline.;SOLUTION: The array of individually controllable elements modulates a beam of radiation. The data processing pipeline converts a first representation of a requested dose pattern to a sequence of control data suitable for controlling the array of individually controllable elements in order substantially to form the requested dose pattern on a substrate. The data processing pipeline comprises an offline pre-processing device and an online rasterizer. The offline pre-processing device converts the first representation of the requested dose pattern to an intermediate representation, which can be rasterized in a fewer number of operations than the first representation.;COPYRIGHT: (C)2012,JPO&INPIT