Method for forming a phosphorus-containing dopants, an area which phosphorus is doped in the semiconductor base material and with a phosphorus-containing dopant

摘要

The provided method of forming a region doped with phosphorus phosphorus-containing dopant into the semiconductor material, and a method for producing a phosphorus-containing dopant. In one embodiment, the phosphorus-containing dopant, phosphorus source comprises a combination of these phosphorus-containing salt, phosphorus-containing acid, or phosphorus-containing anions; the; liquid medium; and combinations of these alkaline materials, or cation, from the alkaline material including. [Selection] Figure Figure 1