Method for producing a gas barrier film, the manufacturing method of preparation and an organic electroluminescence device of the organic electroluminescence resin substrate

摘要

PROBLEM TO BE SOLVED: To provide a method for producing a film having gas barrier properties, and having superior adhesiveness, adequate transparency and gas-barrier stability even when stored in a severe environment, which prevents impurity particles from contaminating the film and can stably produce the film; a method for producing a resin substrate for organic electroluminescence; and a method for manufacturing an organic electroluminescence element.;SOLUTION: The method for producing the film with the gas barrier properties includes forming an adherent film, a ceramic film and a protective film on the resin film sequentially from a resin film side, wherein the adherent film, the ceramic film and the protective film are formed by using a thin-film-forming gas composed of the same composition.;COPYRIGHT: (C)2007,JPO&INPIT