Frequency taxonomic device of frequency measuring method of piezoelectric diaphragm and frequency taxonomic method of piezoelectric diaphragm and frequency measurement equipment and piezoelectric diaphragm of piezoelectric diaphragm.

摘要

PPROBLEM TO BE SOLVED: To provide a frequency measuring method and a frequency measuring apparatus for a piezoelectric vibrating plate, which have good productivity and high reliability in measurement. PSOLUTION: First, the height of lower electrodes 31 to 38 is measured to obtain operation correction information. Then, a crystal vibrating plate Q is sucked from a parts feeder by a first transfer device and is successively transferred to the upper surface of the lower electrode 31 positioned in an installation station of an index table. In a measuring station S, a frequency measuring section is installed. Under the instructions of a control section, the operation correction information for the lower electrode 31 is read from a memory 71 first, and an upper electrode approaches the lower electrode by a moving distance on the basis of the operation correction information. The frequency of the crystal vibrating plate Q is measured in a noncontact manner. The crystal vibrating plate Q is transferred from a discharge station O to a storage box by a second transfer device. PCOPYRIGHT: (C)2007,JPO&INPIT