Phase unique inspection Out manner, and the phase unique inspection which phase unique inspection Out detects

摘要

PROBLEM TO BE SOLVED: To provide a phase singular point detection method, a phase singular point detection device, and a program capable of determining a position of a phase singular point at accuracy of not more than one pixel of an image in the phase singular point detection method, the phase singular point detection device, and the program detecting the phase singular point from image intensity information.;SOLUTION: The phase singular point detection method detecting the phase singular point from the image intensity information includes: a pseudo phase information extraction procedure extracting pseudo phase information from the image intensity information; a phase singular point specifying procedure specifying the position of the phase singular point at resolution of one pixel of the pseudo phase information extracted from the pseudo phase information by the pseudo phase information extraction procedure; and a phase singular point determination procedure interpolating the pseudo phase information near the phase singular point specified by the phase singular point specifying procedure and determining the position of the phase singular point on the basis of the interpolation result.;COPYRIGHT: (C)2008,JPO&INPIT