Forecasting manner of high impurity concentration distribution and the program null which decides high impurity concentration distribution

摘要

Topic It can appraise the extent to cross direction of the impurity at the time of ion implantation, estimate method of the high impurity concentration distribution whose at the same time constraints are few is offered.Solutions With the baseplate it can give the direction which is vertical to the surface with 1st exponent for 1st appraisal where and the baseplate the direction which is given with 1st exponent is inclined from normal direction of the surface for 2nd appraisal to which it prepares. In the baseplate for 1st appraisal, ion implantation is done from vertical direction. Ion implantation is done making use of the ion beam which is parallel with the direction which is given to the baseplate for 2nd appraisal, with 1st exponent. The baseplate for 1st appraisal and concerning the baseplate for 2nd appraisal, the high impurity concentration distribution regarding depth direction is measured. It estimates with the 1st high impurity concentration distribution on the extended line of the ion beam on the basis of with the high impurity concentration distribution of the baseplate was measured for 1st appraisal which and the high impurity concentration distribution of the baseplate for 2nd appraisal, and the 2nd high impurity concentration distribution regarding the direction which crosses in the said extended line. Selective figure Figure 3