Surface evaluation method of surface evaluation apparatus and microscopic object of microscopic object

摘要

PROBLEM TO BE SOLVED: To provide a surface evaluation device of a micro object and a surface evaluation method of the micro object capable of evaluating the surface of one micro object.;SOLUTION: This device is characterized by having a cantilever for fixing the micro object on the tip, a weight change detection means for detecting a weight change of the micro object, a chamber for installing the cantilever in a specific environment, an introduction mechanism for introducing a material capable of interacting with molecular species constituting the surface of the micro object into the chamber, a heating means for heating the micro object, and a component analyzer for analyzing a component in the specific environment.;COPYRIGHT: (C)2008,JPO&INPIT