Maintenance method and method of assembly a mobile device, exposure apparatus, device manufacturing method, the mobile device, as well as the adjustment method of the exposure apparatus, method of assembly and maintenance method

摘要

(21) is pivotally supported by (76) leveling device weight canceling unit (27) on the fine stage. In addition, (21), a pressing portion provided in (21) fine movement stage through polyhedral member, and an air cylinder, leveling locking device for pressing the roller provided on the leveling cup (76) leveling device fine movement stage the swing is mechanically limited by (60). In addition, (21), the swing is mechanically limited by (100) jack stopper device provided by passing the a (23Y) Y fine movement stage and the coarse stage (21) fine movement stage. Therefore, it is possible to stabilize the non-operation when the mobile device the position of the fine movement stage, which is pivotably supported.