Production method of optical thin film evaporation device and optical thin film

摘要

Topic At the same time the optical thin film evaporation device, and the production cost which can produce the optical thin film which possesses satisfactory optical quality inexpensive production method of the optical thin film which possesses satisfactory optical quality is offered.SolutionsBeing the optical thin film evaporation device evaporating the evaporation substance to base substance 14 inside vacuum container 10, distribution facilities it is done inside vacuum container 10, base substance retention expedient opposing to rotary expedient and the base substance 14 which, turn 12 of the dome type which keeps base substance 14 and base substance retention expedient 12 it has niyutoraraiza 40 which irradiates the electron the ion source vis-a-vis 38 which irradiates the ion the evaporation expedient vis-a-vis 34 which is provided and base substance 14 and base substance 14. As for ion source 38, angle of the axis where the ion is irradiated from ion source 38 vis-a-vis the perpendicular line for the surface of base substance 14, ratio of distance of vertical direction in the axis of rotation center of base substance retention expedient and the center of ion source 38, distribution facilities is done in the position where it becomes the range of the 1.2 or less of 0.5 or more below the 40 above the 8 , vis-a-vis the diameter of base substance retention expedient 12.