Method for producing a plate-like body and methods defect inspection apparatus, using these, as well as the recording medium and method of image processing unit data for defect inspection, using them

摘要

From the captured image of the plate-like body, and extracts the defect candidate with a signal threshold. From among the defect candidates extracted plurality of positions in the width direction to search for a defect candidate in the same, to determine the distance between the position of the transport direction of the defect candidate adjacent to the position of the transport direction of the defect candidate searched By repeating, to determine the frequency distribution for the interval. When the frequency of occurrence of the interval of interest is greater than the frequency threshold, the plate-like body determines to have a periodic defect in the transport direction. At this time, the frequency threshold is set to be larger as schematically interval of interest is reduced.