STRUCTURE AND FABRICATION METHOD OF TUNNEL FIELD EFFECT TRANSISTOR WITH INCREASED DRIVE CURRENT AND REDUCED GATE INDUCED DRAIN LEAKAGE (GIDL)

摘要

Gate induced drain leakage in a tunnel field effect transistor is reduced while drive current is increased by orienting adjacent semiconductor bodies, based on their respective crystal orientations or axes, to optimize band-to-band tunneling at junctions. Maximizing band-to-band tunneling at a source-channel junction increases drive current, while minimizing band-to-band tunneling at a channel-drain junction decreases GIDL. GIDL can be reduced by an order of magnitude in an embodiment. Power consumption for a given frequency can also be reduced by an order of magnitude.