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TUNABLE INTERFERENCE FILTER, OPTICAL MODULE, PHOTOMETRIC ANALYZER, AND MANUFACTURING METHOD OF TUNABLE INTERFERENCE FILTER
TUNABLE INTERFERENCE FILTER, OPTICAL MODULE, PHOTOMETRIC ANALYZER, AND MANUFACTURING METHOD OF TUNABLE INTERFERENCE FILTER
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机译:可调谐干扰滤波器,光学模块,光度分析仪以及可调谐干扰滤波器的制造方法
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摘要
A tunable interference filter comprising a first substrate, a second substrate facing the first substrate, a first reflection film formed on the first substrate, a second reflection film formed on the second substrate, the second reflection film facing the first reflection film by interposing a gap, and a gap adjustable-part that adjusts the gap, wherein the second substrate has a first surface and a second surface opposed to the first surface, wherein the second substrate includes a first groove on the first surface, and wherein the second substrate includes a second groove on the second surface, the second groove facing the first groove.
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