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SYSTEM AND METHOD FOR REDUCING THE AMPLITUDE OF THERMALLY INDUCED VIBRATIONS IN MICROSCALE AND NANOSCALE SYSTEMS
SYSTEM AND METHOD FOR REDUCING THE AMPLITUDE OF THERMALLY INDUCED VIBRATIONS IN MICROSCALE AND NANOSCALE SYSTEMS
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机译:减少微尺度和纳米尺度系统中热诱发振动幅度的系统和方法
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摘要
The present invention generally relates to a system and method for improving the precision and applicability of microscale and nanoscale electromechanical systems. The system includes a device (such as an electrostatic sensor) for measuring parameters of a force associated with noise-induced background readings of a microscale or nanoscale electromechanical system, and a device (such as an electrostatic actuator) for applying a countering force to the electromechanical system.
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