METHODS AND APPARATUS FOR SCANNING MICROSCOPY USING ONE OR MORE FRESNEL ZONE PLATES

摘要

Microscopy methods and apparatus in which one or more microfabricated optical elements (e.g., one or more Fresnel zone plates) operate as one or an array of objective lenses. A single object or a plurality of objects may be scanned in parallel. A single, low-numerical-aperture relay optic can be used with the one or more optical elements eliminating the need for one or more confocal pinhole apertures. When an array of optical elements is used, hundreds to thousands of objects can be imaged or inspected simultaneously onto a two-dimensional imaging device, such as a CCD array. The microfabricated optical elements can be readily configured for imaging with a solid immersion medium. Imaging resolutions on the order of one wavelength of the illumination source, and less, can be achieved.