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ION DETECTOR FOR MASS SPECTROMETRY, METHOD FOR DETECTING ION, AND METHOD FOR MANUFACTURING ION DETECTOR

机译:用于质谱法的离子检测器,离子检测方法和制造离子检测器的方法

摘要

The present disclosure provides an ion detector for improving the effect of electric field for pulling in an ion to be detected to a first-stage electrode of a secondary electron multiplier (SEM), and improving the effect of a stray light reduction. In one example embodiment, an ion detector includes a SEM, and a lead-in electrode for pulling in an ion to a first-stage electrode side of the SEM. At least one of the area of the lead-in electrode and a potential difference between the lead-in electrode and neighboring electrodes of the lead-in electrode, the neighboring electrode being an electrode not of the SEM, is set so that the light amount of internal-stray light generated inside the detector entering the first-stage electrode is not more than that of external-stray light generated outside the detector entering the first-stage electrode, when an ion is introduced into the detector.
机译:本公开提供了一种离子检测器,该离子检测器用于改善电场的作用,以将待检测的离子引入二次电子倍增器(SEM)的第一级电极,并改善杂散光减少的效果。在一个示例实施例中,离子检测器包括SEM,以及用于将离子拉入SEM的第一级电极侧的引入电极。设置引入电极的面积和引入电极与引入电极的相邻电极之间的电势差中的至少一个,该邻近电极是不是SEM的电极,以使得光量当将离子引入检测器中时,在检测器内部进入第一级电极的内部杂散光的总和不大于在检测器外部进入第一级电极的外部杂散光的杂散光。

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