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METHOD AND APPARATUS FOR PERFORMING FILM THICKNESS MEASUREMENTS USING WHITE LIGHT SCANNING INTERFEROMETRY
METHOD AND APPARATUS FOR PERFORMING FILM THICKNESS MEASUREMENTS USING WHITE LIGHT SCANNING INTERFEROMETRY
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机译:利用白光扫描干涉法进行膜厚测量的方法和装置
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摘要
The invention relates to a method and an apparatus for measuring the thickness of a transparent film by broad band interferometry, comprising the steps of preparing a correlogram of the film by an interferometer, applying a Fourier transformation to said correlogram to obtain a Fourier phase function, removing a linear component thereof, applying a second integral transformation to the remaining non-linear component to obtain an integral amplitude function of said non-linear component, identifying the peak location of said integral amplitude function and determining the thickness of the film as the double value of the abscissa at said peak location considering a refractive index of a film which is dependent on wavelength. The last two steps may be replaced by identifying the peak locations of said integral amplitude function and determining the thickness of the films as the double values of the abscissas at the peak locations.
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