首页>
外国专利>
Y-Doped Barium Strontium Titanate For Stoichiometric Thin Film Growth
Y-Doped Barium Strontium Titanate For Stoichiometric Thin Film Growth
展开▼
机译:Y掺杂的钛酸锶锶钡用于化学计量薄膜生长
展开▼
页面导航
摘要
著录项
相似文献
摘要
Disclosed is a process for generating thin-film barium strontium titanate (“BST”) having a lattice comprised of a plurality of A lattice sites and a B lattice site, in which a yttrium may be found at a location of at least one location of the plurality of A lattice sites or the B lattice site. In one embodiment, the plurality of A lattice sites comprises a location for at least one from a group consisting of barium and strontium. In one embodiment, the B lattice site comprises a location for a titanium. A capacitor having the inventive Y-doped BST dielectric is also disclosed.
展开▼