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Tandem piezoelectric actuator and single drive circuit for atomic force microscopy
Tandem piezoelectric actuator and single drive circuit for atomic force microscopy
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机译:串联压电致动器和单驱动电路,用于原子力显微镜
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摘要
An apparatus for atomic force microscopy (AFM) comprises a first actuator configured to move a cantilever along an axis; a second actuator configured to move the cantilever along the axis; an amplifier; and a crossover network connected between the amplifier, and the first actuator and the second actuator. The crossover network is adapted to provide a first drive signal to the first actuator over a first frequency range and to provide a second drive signal to the second actuator over a second frequency range.
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