Method of forming gas barrier layers including a change in pressure, a gas barrier layer formed by the method, and a gas barrier film

摘要

A method of forming a gas barrier layer comprises: forming a first layer over a substrate by plasma-enhanced CVD at a first pressure, at least a part of a surface of the substrate being made of an organic material; and forming a second layer on the first layer by plasma-enhanced CVD at a second pressure which is lower than the first pressure.