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INSPECTION RECIPE GENERATION AND INSPECTION BASED ON AN INSPECTION RECIPE
INSPECTION RECIPE GENERATION AND INSPECTION BASED ON AN INSPECTION RECIPE
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机译:检查配方的生成和基于检查配方的检查
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摘要
System, computer readable medium and method. The system includes (i) a data obtaining module arranged to obtain data about at least one portion of an inspected article; and (ii) a processor arranged to perform at least one processing operation of the data out of: (a) processing the data to provide the inspection recipe; and (b) processing the data, while utilizing the inspection recipe, to detect defects; wherein the inspection recipe comprises multiple zones of multiple types of zones; wherein a zone of a first type of zones differs from a zone of a second type of zone.
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