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Methods and Systems for Characterization and Production of High Purity Polysilicon
Methods and Systems for Characterization and Production of High Purity Polysilicon
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机译:表征和生产高纯多晶硅的方法和系统
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摘要
Computer controlled quality control methods for manufacturing high purity polycrystalline granules are introduced. Polycrystalline silicon granules are sampled and converted into single crystal specimen in computer controlled system, eliminating the need of human operator in controlling the processing parameters. Single crystal silicon test samples, then characterized by FTIR and other standard analysis, are therefore more representative of the starting granular silicon.
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