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Method to produce 3-D optical gyroscope my MEMS technology
Method to produce 3-D optical gyroscope my MEMS technology
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机译:利用MEMS技术生产3-D光学陀螺仪的方法
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摘要
A gyroscope sensor includes a gyro disk. A first light source is configured to provide a first light beam adjacent to a first edge of the gyro disk. A first light receiver is configured to receive the first light beam for sensing a vibration at a first direction of the gyro disk.
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