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Circuit arrangement to adjust and calibrate a MEMS-sensor device for flow measurement of gases or liquids
Circuit arrangement to adjust and calibrate a MEMS-sensor device for flow measurement of gases or liquids
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机译:用于调整和校准用于气体或液体流量测量的MEMS传感器设备的电路装置
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摘要
Circuitry is disclosed for the calibration of heating element and ambient temperature sensors, comprising: a) an amplifier having positive and negative inputs, and an output; b) one or more heating MOS transistors selectably coupled in parallel and having 1) a heating transistor drain coupled to the positive input of the amplifier; 2) a heating transistor source configured to receive a supply voltage; and 3) a heating transistor gate coupled to the amplifier output; c) one or more ambient MOS transistors selectably coupled in parallel and having 1) an ambient transistor drain, 2) an ambient transistor gate coupled to the amplifier output; and 3) an ambient transistor source configured to receive the supply voltage; d) a temperature difference resistance configured: 1) to be coupled at least partially between an ambient connection and the ambient transistor drain; and 2) to be coupled at least partially between the ambient connection and the negative input of the amplifier.
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