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Method for polishing tape-shaped substrate for oxide superconductor, oxide superconductor, and base material for oxide superconductor

机译:氧化物超导体的带状基板的研磨方法,氧化物超导体及氧化物超导体的基材

摘要

An oxide superconductor member is composed of a tape-shaped substrate, an intermediate layer formed on this substrate and an oxide superconductor thin film layer formed on this intermediate layer. A surface of the tape-shaped substrate is polished by continuously running the tape-shaped substrate. The polishing step includes initial polishing process and finishing process which are carried out such that the average surface roughness Ra of the substrate becomes 2 nanometers or less and the in-plane directionality of the intermediate layer becomes 5° or less after the polishing step.
机译:氧化物超导体构件由带状基板,形成在该基板上的中间层和形成在该中间层上的氧化物超导体薄膜层构成。带状基板的表面通过使带状基板连续运转而被抛光。抛光步骤包括初始抛光工艺和精加工工艺,其进行以使得在抛光步骤之后基板的平均表面粗糙度Ra为2纳米或更小并且中间层的面内方向性为5°或更小。

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