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Sub-wavelength grating integrated VCSEL

机译:亚波长光栅集成VCSEL

摘要

A vertical cavity surface emitting laser (VCSEL) is described using a sub-wavelength grating (SWG) structure that has a very broad reflection spectrum and very high reflectivity. The grating comprises segments of high and low refractive index materials with an index differential between the high and low index materials. By way of example, a SWG reflective structure is disposed over a low index cavity region and above another reflective layer (either SWG or DBR). In one embodiment, the SWG structure is movable, such as according to MEMS techniques, in relation to the opposing reflector to provide wavelength selective tuning. The SWG-VCSEL design is scalable to form the optical cavities for a range of SWG-VCSELs at different wavelengths, and wavelength ranges.
机译:使用具有非常宽的反射光谱和非常高的反射率的亚波长光栅(SWG)结构描述了垂直腔表面发射激光器(VCSEL)。光栅包括高折射率材料和低折射率材料的片段,在高折射率材料和低折射率材料之间具有折射率差。举例来说,将SWG反射结构设置在低折射率腔区域上方和另一反射层(SWG或DBR)上方。在一个实施例中,例如根据MEMS技术,SWG结构相对于相对的反射器是可移动的,以提供波长选择性调谐。 SWG-VCSEL设计可扩展以形成用于不同波长和波长范围的一系列SWG-VCSEL的光腔。

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