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Method, system, and computer program product for implementing a direct measurement model for an electronic circuit design
Method, system, and computer program product for implementing a direct measurement model for an electronic circuit design
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机译:用于实现电子电路设计的直接测量模型的方法,系统和计算机程序产品
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摘要
Various embodiments of the present invention are generally directed to a method, system, and computer program product for implementing direct measurement model with simulation and calibration of manufacturing process model in the manufacturing of precision devices such as electronic integrated circuits. The method and the system determine the measured measurement result and the direct measurement information and compare the direct measurement information against the other to determine whether to adjust the process models and the empirical parameters thereof.
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