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Contamination analysis unit and method thereof, and reticle cleaning system
Contamination analysis unit and method thereof, and reticle cleaning system
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机译:污染分析单元及其方法以及掩模版清洁系统
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摘要
A contamination analysis unit and method for inspecting pollutants remaining on a target side of an inspection object such as a reticle after cleaning the object is provided. After steeping the target side in a solution, a sampling liquid may be abstracted therefrom after a predetermined time and may be analyzed.
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