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Defect classifier using classification recipe based on connection between rule-based and example-based classifiers
Defect classifier using classification recipe based on connection between rule-based and example-based classifiers
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机译:使用基于基于规则的分类器和基于示例的分类器之间的连接的分类配方的缺陷分类器
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摘要
In apparatuses for automatically acquiring and also for automatically classifying images of defects present on a sample such as a semiconductor wafer, a classifying system is provided which are capable of readily accepting even such a case that a large number of classification classes are produced based upon a request issued by a user, and also even such a case that a basis of the classification class is changed in a high frequency. When the user defines the classification classes, a device for designating attributes owned by the respective classification classes is provided. The classifying system automatically changes a connecting mode between an internally-provided rule-based classifier and an example-based classifier, so that such a classifying system which is fitted to the classification basis of the user is automatically constructed.
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