Saw torque and temperature sensor with improved temperature sensitivity

摘要

A contactless SAW based torque and temperature sensor comprising a first (2) and second (3) SAW resonator provided on a substrate made of Y+34° cut of quartz. The first SAW resonator (2) has its principle axis inclined at +45° to the X-axis of the substrate, which, in use is either aligned with the longitudinal axis of the device who torque is to be measured or is perpendicular thereto, and the second SAW (3) has its principle axis inclined at −45° to the X-axis of the substrate. A third SAW (4) has its principle axis inclined at an angle of 30 degrees to the X-axis of the substrate. Each said SAW resonator (2,3,4) is formed by laying a film of aluminum on the substrate having a thickness (h) and the SAW resonators have an average operating wavelength λ where the ratio h/λ is in the range 0.021 to 0.032.