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SAW TORQUE AND TEMPERATURE SENSOR WITH IMPROVED TEMPERATURE SENSITIVITY
SAW TORQUE AND TEMPERATURE SENSOR WITH IMPROVED TEMPERATURE SENSITIVITY
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机译:锯齿转矩和温度传感器,提高了温度灵敏度
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摘要
A contactless SAW based torque and temperature sensor comprising a first (2) and a second (3) SAW resonator provided on a substrate made of Y+34° cut of quartz. The first SAW resonator (2) has its principle axis inclined at +45° to the X-axis of the substrate, which, in use, is either aligned with the longitudinal axis of the device whose torque is to be measured or is perpendicular thereto, and the second SAW (3) has its principle axis inclined at -45° to the X-axis of the substrate. A third SAW (4) has its principle axis inclined at an angle of 30 degrees to the X-axis of the substrate. Each said SAW resonator (2, 3, 4) is formed by laying a film of aluminium on the substrate having a thickness (h) and the SAW resonators have an average operating wavelength λ where the ratio h/λ is in the range 0.021 to 0.032
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