首页> 外国专利> Method for manufacturing wiring, thin film transistor, light emitting device and liquid crystal display device, and droplet discharge apparatus for forming the same

Method for manufacturing wiring, thin film transistor, light emitting device and liquid crystal display device, and droplet discharge apparatus for forming the same

机译:配线的制造方法,薄膜晶体管,发光装置及液晶显示装置以及形成该液滴的液滴喷出装置

摘要

As a semiconductor device, specifically, a pixel portion included in a semiconductor device is made to have higher precision and higher aperture ratio, it is required to form a smaller wiring in width. In the case of forming a wiring by using an ink-jet method, a dot spreads on a wiring formation surface, and it is difficult to narrow width of a wiring. In the present invention, a photocatalytic substance typified by TiO2 is formed on a wiring formation surface, and a wiring is formed by utilizing photocatalytic activity of the photocatalytic substance. According to the present invention, a narrower wiring, that is, a smaller wiring in width than a diameter of a dot formed by an ink-jet method can be formed.
机译:具体地,作为半导体器件,使半导体器件中包括的像素部分具有更高的精度和更高的开口率,需要形成宽度较小的布线。在通过喷墨法形成配线的情况下,点在配线形成面上扩散,难以使配线的宽度变窄。在本发明中,在配线形成表面上形成以TiO 2 为代表的光催化物质,并通过利用光催化物质的光催化活性来形成配线。根据本发明,可以形成比通过喷墨法形成的点的直径更窄的布线,即,宽度更小的布线。

著录项

  • 公开/公告号US8105945B2

    专利类型

  • 公开/公告日2012-01-31

    原文格式PDF

  • 申请/专利权人 OSAMU NAKAMURA;KIYOFUMI OGINO;

    申请/专利号US201113034771

  • 发明设计人 KIYOFUMI OGINO;OSAMU NAKAMURA;

    申请日2011-02-25

  • 分类号H01L21/44;

  • 国家 US

  • 入库时间 2022-08-21 17:26:18

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