Capacitive sensor core with flexible hinge and sensor using the same

摘要

A capacitive sensor core with flexible hinge includes a main grid plate, an auxiliary grid plate, and a mechanical structure transferring the measuring quantity to the displacement between the main grid plate and the auxiliary grid plate, the mechanical structure includes a stationary element and a moving element, the auxiliary grid plate and the main grid plate are fixed to the driven portion of the moving element and the corresponding position of the stationary element respectively, the stationary element and the moving element are connected through a flexible hinge; the flexible hinge consists of at least two supporting spring leafs, one end of each of the supporting spring leafs is connected to the stationary element, the other end is connected to the moving element; the plane of each of the supporting spring leafs is perpendicular to the planes of the main and auxiliary grid plates.