Method and device for frequency-response correction in vibration isolation systems

摘要

To achieve improved frequency-response correction of a vibration-signal transmitter in a vibration isolation system, the invention proposes a method in which an analog sensor signal representing vibrations is generated through the use of a vibration-signal transmitter, this sensor signal is amplified for correcting frequency-dependent sensitivity of the vibration-signal transmitter, an actuator control signal is generated by processing the amplified sensor signal, and an actuator is controlled with the actuator control signal for counteracting the vibrations, wherein the amplification of the sensor signal includes first amplification through the use of an analog amplification stage and second amplification through the use of a digital amplification stage. The invention further proposes a correction device and also a vibration isolation system for carrying out the method.