MICRO-POSITIONING, MICRO-ORIENTATION AND MICRO-DISPLACEMENT SYSTEM WITH SIX DEGREES OF FREEDOM

摘要

The invention relates to a micro-positioning, micro-orientation and micro-displacement system with six degrees of freedom used for catching-describing vibrations, operating as an accelerometer, for actively and passively damping structures, inducing vibrations, operating as a modal exciter, for machining, controlling and handling operations, in the fields of fine mechanics, optics, microelectronics and microbiology. According to the invention, the system comprises a fixed reference plate (1) which is rigidly integral with a monoblock mechanical support (2) having six identical arms interlinked by means of six areas (ZA) also used for assembling, three for the assembling with the reference plate (1) and three for the assembling with a mobile plate (3) by means of some screws (4) and each of the six arms of the monoblock mechanical support (2) contains a mechanical support structure (SMS), a piezoelectric structure (5), two interlinking sectors with a square cross-section and two flexible joints (AF) at its ends and carries out the functions of an active element with controlled elongation-compression, thus the six active elements determine the position of the mobile plate (3) with respect to the reference plate (1) depending on six degrees of freedom, three displacements on axes (x, y, z) and three rotations (r, r, r) about said axes.